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All tools

 NameManufacturerModelCurrent toolratetype name
DetailsVacuum storage (small)--A
DetailsMo sputter - MRC IIMRC---B
DetailsE-beam/resisitive evaporator - BABaltzersBAB
DetailsVacuum storage (large)--A
DetailsEvaporator - UMSBaltzersUMSC
DetailsSpin-Rinse-Dryer------A
DetailsGlass substrate cleanerSemitool-A
DetailsSputter - DC / RFFHR---A
DetailsIon Beam EtcherMSL-LKMark 1A
DetailsPlasma EtcherPlasma EtchPE-100A
DetailsX-Ray Inspection StationNikonXT V 130B
DetailsVacuum Leak TesterAdixenASM 142A
DetailsIon Polisher IlionGatanllion IIA
DetailsOptical MicroscopeLeitz---A
DetailsTEM/EDS - TitanFEITitan Themis 200D
DetailsSEM/EDS/EBSD - MerlinZeissMerlinC
DetailsFIB/SEM - CrossbeamZeissZeiss Crossbeam 550D
DetailsCIGS evaporator - BAKBaltzersBAK 550C
DetailsSpectroscopic reflectometer "K-MAC"K-MACST4000-DLXA
DetailsEBL (e-beam litho) - NBLNanoBeam Ltd.nB5D
DetailsOptical MicroscopeNikonEclipse ME600B
DetailsIon Beam EtcherScientific Vacuum Systemsi6000 Milling SystemB
DetailsVertical Furnace (oxidation)Koyo LindbergMicro TF-6A
DetailsVertical Furnace (oxidation)Koyo LindbergMicro TF-6A
DetailsVertical Furnace (general purpose)Koyo LindbergMicro TF-6B
DetailsVertical Furnace (metal anneal)Koyo LindbergMicro TF-6B
DetailsVertical Furnace - LPCVD (poly-Si, a-Si)Koyo LindbergMicro TF-6LPC
DetailsVertical Furnace - LPCVD (Si3N4, SiNx)Koyo LindbergMicro TF-6LPC
DetailsVertical Furnace - LPCVD (TEOS oxide)Koyo LindbergMicro TF-6LPC
DetailsVertical Furnace (high temp anneal)Koyo LindbergMicro TF-6B
DetailsICP-RIE (Si-DRIE) "Tegal"Tegal110 S/DED
DetailsIR cameraHamamatsuC2742A
DetailsOptical MicroscopeNikonEclips L200NDA
DetailsMeasuring Microscope with Digital ReadoutNikon/MetronicsMM-40/Quadra Chek 200A
DetailsStereo MicroscopeNikonC-LEDSA
DetailsWet Bench / E-beam resist spinnerStangl / PolosSPIN 150iB
DetailsWet Bench / E-beam resist hot-plateStangl---B
DetailsWet Bench / E-beam resist developmentStangl---B
DetailsICP-RIE (Si-DRIE / aluminum etch)PlasmaThermSLR with two 770 ICP chambersD
DetailsPlasmastripper "Upper"Tepla300B
DetailsRIE (SiO / SiN)Advanced VacuumVision 320C
DetailsResist spinnerPolosSPIN 150iA
DetailsEBL (e-beam litho) - JEOLJEOL Ltd.JBX-8100FSD
DetailsSpin-Rinse-DryerSemitool470S with 102 controllerA
DetailsPlasmastripper "New Lower"Tepla300A
DetailsSputter - magnetron "Lesker"Kurt J. Lesker CompanyCMS-18D
DetailsTCO sputtervon ArdenneCS730 D
DetailsSputter - magnetron "Von Ardenne"Von ArdenneCS 730SD
DetailsFour Point Probe - automaticAITCMT-SR2000NA
DetailsFour Point ProbeOssilaT2001A3A
DetailsEllipsometer "Rudolph"Rudolph Research---B
DetailsSputter - table-topQuorumQ300TD plusB
DetailsStylus Profiler "DektakXT"DektakXTA
DetailsStylus Profiler "Dektak 150"Bruker / VeecoDektak 150A
DetailsEvaporator - TMP (general use)Kurt J. Lesker CompanyPVD 75C
DetailsEvaporator - cryo (restricted use)Kurt J. Lesker CompanyPVD 75C
DetailsALD - MP3--C
DetailsXRFPanalyticalEpsilon 5B
DetailsALD - F120MicrochemistryF120C
DetailsNanoindenterCSMUNHTE
DetailsTube Furnace - pipe 1Temprex---A
DetailsLaminatorPanamacDM-12B
DetailsUHV-PVDPrevacN/AA
DetailsOptical MicroscopeLeitz ErgoluxA
DetailsWire Bonder - ballKulicke & Soffa4524A DigitalB
DetailsWet Bench - acidStangl---B
DetailsWet Bench - acidStangl---B
DetailsWet Bench - work deskStangl---B
DetailsWet Bench - Water rinseStangl-B
DetailsMask Aligner - front side alignKarl SüssMA6C
DetailsResist Furnace (110 C)Memmert---A
DetailsNanoimprinterObducatNIL-6D
DetailsOptical microscopeOlympusMX63A
DetailsWet Bench - solvent cleaningStangl-A
DetailsImage Reversal / Vapor Prime FurnaceYield Engineering SystemsYES-58TA-EA
DetailsResist Furnace (90 C)Memmert---A
DetailsVac. / Vap. Prime FurnaceStar2000B
DetailsMask Aligner - front / back side alignKarl SüssMA6 / BA6C
DetailsSpin CoaterSüss MicroTecLabSpin6B
DetailsSpin-Spray CoaterEVG101B
DetailsOptical MicroscopeOlympus---A
DetailsHot PlateSüss MicroTecHP8 BMA
DetailsHot PlateSüss MicroTecHP8 BMA
DetailsWire Bonder - ballKulicke & Soffa4522B
DetailsWire Bonder - wedgeKulicke & Soffa4526B
DetailsHot PlateBLE---A
DetailsSpin CoaterKarl SüssRC8 (Gyroset)B
DetailsSpin CoaterBLEDelta 10B
DetailsResist FurnaceHeraeus---A
DetailsResist FurnaceBinder---A
DetailsResist LaminatorMEGA Electronics305A
DetailsLaser cutterÖstlingAIO G+ 532 nm 5 WC
DetailsPCB plotterLPKFS104B
DetailsHydraulic Press (w. heater)BungardRMP 210A
DetailsHT Furnace - atmThermolyne---A
DetailsPick-&-Place (w. dispenser)LPKFProtoPlace SA
DetailsScreen PrinterLPKFProtoPrint SA
DetailsDip CoaterBungardRDC 21A
DetailsSolder FurnaceLPKFProtoFlow SA
DetailsResist LaminatorBungardRLM 419 pA
DetailsUV ExposureBungardHellas-EA
DetailsSpray EtcherSolectro---A
DetailsSpectroscopic ellipsometerWoollamRC2-XIC
DetailsALD - inSEPicosun / WoollamP R200 / W RC2B
DetailsInk Jet PrinterFuji FilmDimatix 2831B
DetailsALDPicosunR200C
DetailsFume Hood – KCN--A
DetailsFume Hood - CBD------A
DetailsPL / EL Quantum YieldEdinburgh InstrumentsFLS 1000 customA
DetailsCZTS sputter--C
DetailsSputter - magnetron ZnO/CZTSVon ArdenneCS 600B
DetailsSulfoselenisation Furnace (SuSe)------B
DetailsDicing SawDiscoDAD 361B
DetailsParylene CoaterParatechLab Top 3000A
DetailsBalanceDenver InstrumentXL410DA
DetailsBalanceSartorusBP4100A
Details2-photon writerUpNanoUp250C
DetailsExtruderThermo ScientificProcess 11 Parallel Twin-screw ExtruderB
DetailsHot PlateHeidolphMR3003A
DetailsIon mill PIPSGatanPIPSA
DetailsUltrasonic CleanerSonorex---A
DetailsHot PlateHeidolphMR3003A
DetailsPolisherStruersDAP-VA
DetailsDimple GrinderGatan656A
DetailsIon Mill PIPSGatanPIPS model 691A
Details3D Optical Profiler ZYGOZYGONexViewA
DetailsLOM - Olympus - Optical MicroscopeOlympusAX70A
DetailsAFM - PSIA XE150PSIAXE150B
DetailsESCA IIPhysical ElectronicsQuantera IIC
DetailsSEM/EDS - 1530Carl ZeissSEMC
DetailsLOM - Leica DVM6 - Optical MicroscopeLeica MicrosystemsDVM6A
DetailsPlasma CleanerFischione---A
DetailsBalanceMettlerToledoA
DetailsSaw - low speedBuehlerIsometB
DetailsSawBuehlerIsometB
DetailsEmbedderBuehlerSimplimetB
DetailsWet GrinderBuehlerMetaservB
DetailsPolisherBuehlerMetaservB
DetailsPolisherBuehlerPhoenixB
DetailsSputter Coater - Au/PdPolaronSC7640B
DetailsEvaporator (C)Polaron---B
DetailsUltrasonic CleanerMetason50A
DetailsDiamond polishingStruersDAP VA
DetailsUltrasonic CleanerBranson5510A
DetailsFurnaceHeraeus---A
DetailsPolisherBuehlerEcomet 3A
DetailsSEM/EDS - 1550ZeissLEO1550C
DetailsUltrasonic Disc CutterGatan601A
DetailsScriberBosch---B
DetailsGDOESSpectrumaGDA 750 HRB
DetailsFume hood – solvents--A
DetailsPlating Station - pulse (Cu)LPKFMiniContac-RSA
DetailsWet Bench Etch and stripStangl---B
DetailsWet Bench Acid surface treatmentsStangl---B
DetailsWet Bench (RCA1 / RCA2 / HF)Stangl---B
DetailsWet Bench (RCA1 / RCA2 / HF)Stangl---B
DetailsWet Bench Solvent cleanStangl---B
DetailsWet Bench Resist lift-offStangl---B
DetailsWet Bench Oxide etchingStangl---B
DetailsWet Bench Piranha Stangl---B
DetailsWet Bench Metal etchingStangl---B
DetailsWet Bench - Megasonic cleaningStangl---B
DetailsWet Bench - Ultrasonic cleaningStangl---B
DetailsWet Bench - free acid / acid drain (KOH)Stangl---B
DetailsWet Bench (KOH / HF)Stangl---B
DetailsWet Bench (KOH-IPA / HF / warm rinse)Stangl---B
DetailsPC12 - wet bench - Stangl--B
DetailsWet Bench - acid drain, spin dryerStangl---B
DetailsFume hood – acids--A
DetailsRTPMPTCRTP-600SB